A molecular pump operates as a specialized vacuum pump, relying on the high-speed rotation of a rotor to impart momentum to gas molecules, directing them with velocity towards the exhaust port. This action compresses and propels the molecules, expelling them as the primary stage of evacuation. To enhance the pump’s efficiency, it features grooves carved either on the outer surface of the rotor cylinder or the inner surface of the pump body, allowing for the utilization of higher linear velocity at the cylinder’s outer circumference.
The turbo stage, with its larger pumping area, achieves high pumping speeds. In contrast, the traction stage, equipped with grooves, has a relatively smaller pumping area. At the interface of these two structures, the flow pattern of gas molecules, compressed by the turbo blades, undergoes a sudden transition. This transformation results in the shift from orderly gas molecule movement to chaotic motion at the junction, leading to increased backflow and a reduction in pumping capacity.
Operating Conditions
Operational conditions of a molecular pump involve a rotor speed of 20,000 revolutions per minute (r/min). This high speed necessitates a longer startup time. The gas within the pump operates in a molecular flow state, requiring a preceding pump, typically a rotary vane pump.
Characteristics of Molecular Pumps
Here are some notable characteristics of molecular pumps:
- Oil-lubricated molecular pumps demand a small amount of lubricating oil, minimizing contamination of the vacuum chamber as they operate in the preceding vacuum stage.
- Grease-lubricated molecular pumps use a minute amount of grease, achieving nearly oil-free, clean vacuum conditions when paired with a dry pump in the preceding stage.
Fully magnetic levitation molecular pumps operate without the need for lubrication and are used in conjunction with dry pumps to create oil-free, clean vacuum environments.
Applications Beyond the Vacuum Chamber
These molecular pumps find applications in various fields such as analysis (Mass Spectrometry, Electron Microscopy), semiconductor manufacturing (Electronic Components, Integrated Circuits), optics and glass industries (Thermal Protection, Coatings), coating applications (Surface Protection, Decorative Coatings), vacuum metallurgy, leak testing, research experiments, and lamp production.
Troubleshooting the Molecular Pump
When troubleshooting a molecular pump, several common issues and solutions are as follows:
- Uneven Heating: If the molecular pump exhibits uneven heating (one side hot, the other cold), it could be due to nearby illumination or heat sources. The solution is to avoid exposure to light or remove the heat sources.
- Oil Discoloration: Blackening of the oil may result from poor cooling or excessive load. Inspect the cooling system and check the vacuum system for resolution.
- Frequency Fluctuations: If the pump experiences frequent fluctuations in frequency during operation, it may be due to excessive load or insufficient system vacuum. Investigate and rectify issues within the system.
- Bearing Damage: Bearings can burn out due to factors such as inadequate maintenance, overheating, delayed oil changes, or the presence of dust in extracted gases. Regular maintenance, cooling system checks, prompt oil changes, and dust isolation can prevent this.
- Foreign Object Intrusion: Even with protective mesh in place, large objects may fall into the pump. This could be attributed to damaged protective mesh or a compromised preceding stage pipeline. Optimizing the system design can address this issue.
- Oil Backflow: In situations with excellent vacuum levels, oil may return to the preceding stage pipeline due to damaged oil pools or faulty seals. Inspecting the oil pool is crucial in such cases.
- Oil Pool Issues: Under normal usage, oil pools in molecular pumps may develop cracks or deform due to overheating and excessive load. This necessitates inspection of the cooling system and overall system health.
- Foreign Objects Inside the Pump: The occasional occurrence of threads and bolts falling out of the pump, such as M5 threads, may not affect the molecular pump’s performance. This issue is possibly related to omitted balance nails during balancing.
- Clamp Requirements: Ensuring the safe use of the rubber ring on the molecular pump flange involves using at least three clamps, with the option to choose from 3, 6, 12, or 24 depending on the flange’s size.
- Inverter Power Issues: Program loss or confusion caused by inverter power can result from voltage instability, strong interference, high voltage ignition, or human decryption attempts.
- Noise Levels: Defining high noise in a molecular pump can be challenging. Generally, noise levels should remain below 72 decibels (dB) to be considered acceptable. Specialized instruments and testing environments are required for accurate measurement.
- Cooling Requirements: Proper cooling is crucial for molecular pumps. Insufficient cooling can lead to issues such as unplanned shutdowns, pump damage, and oil darkening. Water temperature and flow rate should be carefully monitored.
- Power Supply Grounding and Shielding: Addressing grounding and shielding issues in the power supply involves ensuring a good local power grid ground and protection against strong magnetic fields and radiation.
- Inverter Shutdown (‘Poff’): If the inverter power supply shuts down and displays ‘Poff’ when speed increases during the process, it may be due to low voltage.
- Blade Fragmentation: Several factors can lead to the fragmentation of molecular pump blades, including misoperation, foreign object intrusion, voltage instability, inefficient preceding pumps, poor dynamic balancing during maintenance, and the use of non-standard bearings in the bearing part. Careful attention to these factors can help prevent blade damage.
In summary, molecular pumps play a crucial role in various industries and applications, but their optimal performance relies on meticulous maintenance and addressing potential issues promptly.
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